LOW-TEMPERATURE AEROSOL CLEANING METHOD AND SYSTEM

PROBLEM TO BE SOLVED: To ensure efficient cleaning by reducing the consumption of argon gas. SOLUTION: When an article 10 being cleaned is cleaned by blowing cooled cleaning gas from a nozzle 20, thereby bringing aerosol 24 into collision against the article 10, a cleaning gas cooled through one coo...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	SONODA YUZURU
Format:	Patent
Sprache:	eng
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY NOZZLES PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To ensure efficient cleaning by reducing the consumption of argon gas. SOLUTION: When an article 10 being cleaned is cleaned by blowing cooled cleaning gas from a nozzle 20, thereby bringing aerosol 24 into collision against the article 10, a cleaning gas cooled through one cooling system (38) is supplied alternately to a plurality of cleaning chambers 42A and 42B, thus cleaning the article 10 alternately in respective cleaning chambers.