LIQUID PHASE GROWTH METHOD, LIQUID PHASE GROWTH DEVICE AND SEMICONDUCTOR DEVICE

PROBLEM TO BE SOLVED: To uniformly grow a material to be grown on substrates 101 in a high speed regardless of the number of sheets of the substrates 101. SOLUTION: A vessel 105 filled with molten metal 104 containing the material to be grown, dipping means 103, 113 for dipping the substrates 101 in...

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Bibliographische Detailangaben
Hauptverfasser: SAITO TETSUO, UKIYO NORITAKA, SHOJI TATSUMI, NISHIDA AKIYUKI, IWAGAMI MAKOTO, YOSHINO TOSHIHITO, NAKAGAWA KATSUMI, MIZUTANI MASAKI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To uniformly grow a material to be grown on substrates 101 in a high speed regardless of the number of sheets of the substrates 101. SOLUTION: A vessel 105 filled with molten metal 104 containing the material to be grown, dipping means 103, 113 for dipping the substrates 101 into the molten metal 104, a magnet 109 arranged at the periphery of the vessel 105, and a moving means for relatively moving the magnet 109 and the vessel 105 are provided.