APPARATUS AND METHOD FOR NONCONTACT MEASUREMENT OF SHAPE

PROBLEM TO BE SOLVED: To provide an apparatus and a method for the noncontact measurement of a shape wherein the shape of a substrate and that of a solder bump can be found quickly by medium. SOLUTION: A noncontact shape measuring apparatus is provided with a random light projection means which proj...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAKAGAKI TADASHI, KISHIDA KAZUYOSHI, HIRONAKA KOJI
Format: Patent
Sprache:eng
Schlagworte:
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