METHOD FOR MANUFACTURING COLOR FILTER SUBSTRATE AND ANNEALING FURNACE USED IN THE METHOD

PROBLEM TO BE SOLVED: To provide a method for manufacturing a color filter substrate with excellent optical characteristics by improving characteristics of coloring layers. SOLUTION: First, the coloring layers of respective colors of blue(B), green(G) and red(R) are formed on a base material for the...

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Bibliographische Detailangaben
Hauptverfasser:	ASANO MASAAKI, IKEGAMI TAKESHI, KAGA YASUMASA
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for manufacturing a color filter substrate with excellent optical characteristics by improving characteristics of coloring layers. SOLUTION: First, the coloring layers of respective colors of blue(B), green(G) and red(R) are formed on a base material for the color filter substrate (step 101). An alkali development type acrylic resin with a pigment dispersed therein can be used as a photosensitive coloring resist. Next, the coloring layers of the respective colors formed on the base material are heat treated (pretreated) in the atmosphere (step 102) and subsequently an ITO(indium tin oxide) film is deposited on the coloring layers of the respective colors formed on the base material at low temperature (step 103). Finally, the ITO film deposited on the coloring layers is subjected to an annealing treatment under the reductive atmosphere (step 104). An oxygen concentration of the reductive atmosphere is preferably about 1-5%.