ELECTRIC DISCHARGE TREATMENT METHOD FOR INSIDE SURFACE OF OBJECT TO BE TREATED AND ELECTRIC DISCHARGE TREATMENT APPARATUS

PROBLEM TO BE SOLVED: To provide an electric discharge treatment method whereby all the inside wall surface of an object to be treated can be uniformly subjected to a plasma treatment without the necessity for a plasma atmosphere formation gas even when the object is large-sized; and an electric dis...

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Hauptverfasser: AKUTSU KENSUKE, IWATA AKINORI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an electric discharge treatment method whereby all the inside wall surface of an object to be treated can be uniformly subjected to a plasma treatment without the necessity for a plasma atmosphere formation gas even when the object is large-sized; and an electric discharge treatment apparatus therefor. SOLUTION: A sheet-like counter electrode 2 is wound around the outer surface of a cylindrical dielectric 4. In the inside space of the cylindrical dielectric 4, a plastic-made cylindrical object 3 to be treated is placed; and in the hollow part of the object 3, a rod-like discharge electrode 1 is placed. Between the discharge electrode 1 and the counter electrode 2, a pulse high-voltage is applied by a pulse high-voltage formation circuit comprising a negatively polar high-voltage electric source circuit and a wave-form formation circuit, thus causing corona discharge and forming a plasma atmosphere without using a plasma atmosphere formation gas. By the plasma atmosphere, all the inside wall surface of the object 3 is subjected to a uniform plasma treatment even when the object is large-sized.