COMPOSITION OF CLEANING AGENT

PROBLEM TO BE SOLVED: To provide a cleaning agent composition which is usable as a cleaning agent for a wiring or an electrode, having tungsten or a tungsten alloy and which has high removability of a deposit and a small corrosion amount of the tungsten or the tungsten alloy. SOLUTION: The cleaning agent composition for the wiring or the electrode, having tungsten or the tungsten alloy contains an acid, having n-th acid dissociation index pKan (25 deg.) of n-valent basic acid of 3 to 11, and ammonia or ammonium ions of neutralization which is equivalent of 70 to 130%, with respect to its acid equivalent in such a manner that the pH of the composition is 4 or larger in the composition for cleaning the wiring or the electrode having the tungsten or the tungsten alloy, the wiring having aluminum or an aluminum alloy and/or the wiring having copper or a copper alloy and containing the acid having the n-th acid dissociation index pKan (25 deg.) of n-valent basic acid of 3 to 11, and an ammonia or an ammonium ion of neutralization equivalent of 70 to 130%, with respect to its acid equivalent in such a manner that the pH of the composition is 4 or larger.