MAGNETIC THIN FILM AND ITS HEAT TREATMENT METHOD

PROBLEM TO BE SOLVED: To provide a magnetic thin film which has a predetermined thin film structure and is ferromagnetic by the use of an Ni-Mn-based alloy of a bulk material and a relationship between its ferromagnetic quality and heat treatment condition. SOLUTION: This magnetic thin film is a mag...

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Bibliographische Detailangaben
1. Verfasser:	GONDA MASAYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRICITY INDUCTANCES MAGNETS SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES TRANSFORMERS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a magnetic thin film which has a predetermined thin film structure and is ferromagnetic by the use of an Ni-Mn-based alloy of a bulk material and a relationship between its ferromagnetic quality and heat treatment condition. SOLUTION: This magnetic thin film is a magnetic thin film constructed by a substrate, an underlying film formed on the substrate, and a magnetic film formed on the underlying film. The magnetic film includes the Ni-Mn-based alloy in the range from 15 at.% to 40 at.% Mn and the balance consisting of Ni and unavoidable impurities. The magnetic thin film is formed in a thickness from 5 nm to 500 nm, and the underlying film is preferably formed of one element or more selected from the group consisting of tantalum, titanium, and niobium.