ELECTRON EMITTING ELEMENT, ELECTRON SOURCE, AND MANUFACTURING METHOD FOR IMAGE FORMING DEVICE

PROBLEM TO BE SOLVED: To provide a manufacturing method for an electron emitting element and electron source capable of forming a carbon or a carbon, compound film having good crystallinity in the activating process in a shorter time. SOLUTION: The manufacture of the electron emitting element and el...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KAMISHIRO KAZUHIRO, ONISHI TOSHIICHI
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a manufacturing method for an electron emitting element and electron source capable of forming a carbon or a carbon, compound film having good crystallinity in the activating process in a shorter time. SOLUTION: The manufacture of the electron emitting element and electron source comprises two processes, one to form a pair of conductors 4 installed on a substrate 1 at a ceratin spacing from each other and the other as activating process to deposit carbon or carbon compound 4a on at least either of the two conductors in an atmosphere with carbon compound gas, wherein the activation takes place in a plurality of processes at two or more stages including a first process and a second process, with the first process being conducted in an atmosphere having a larger partial pressure of carbon compound gas than in the second process as the final stage of activation.