METHOD FOR RECYCLING PERFLUORO COMPOUND BY LOW- TEMPERATURE PURIFICATION

PROBLEM TO BE SOLVED: To provide a highly efficient low-temperature purifying system suppressing an energy load for recycling components useful as perfluoro compounds(PFC) for a semiconductor production process from a PFC mixture containing an inert low-boiling component. SOLUTION: This method for r...

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Hauptverfasser:	EDASAWA KATSUTO, NAGANO SHUJI, OYA KOZO, MANABE TAKESHI, NITTA AKIHIKO, HACHITAKA KENICHI, ANDO HIDEKI, GOTO MASATOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	ACYCLIC OR CARBOCYCLIC COMPOUNDS BLASTING CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS COMBINED HEATING AND REFRIGERATION SYSTEMS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HEAT PUMP SYSTEMS HEATING LIGHTING LIQUEFACTION SOLIDIFICATION OF GASES LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS MANUFACTURE OR STORAGE OF ICE MECHANICAL ENGINEERING METALLURGY MIXTURES BY PRESSURE AND COLD TREATMENT ORGANIC CHEMISTRY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL REFRIGERATION OR COOLING SEPARATION TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE THEIR RELEVANT APPARATUS TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a highly efficient low-temperature purifying system suppressing an energy load for recycling components useful as perfluoro compounds(PFC) for a semiconductor production process from a PFC mixture containing an inert low-boiling component. SOLUTION: This method for recycling comprises prefeeding a high-boiling fluoride (5) into a rectifying device, thereby reducing energy required for cooling, isolating the useful PFC components in the PFC mixture with the recrifying device, filling the components in containers (10), (11) and (12) for each component so as to be feedable for reutilizing as the PFC for the semiconductor production process when the recovered PFC mixture is separated with the rectifying device provided with a condenser (9), a separating tank (4), a heater (6) and a connecting pipe (7).