LINEAR MOTOR AND STAGE APPARATUS

PROBLEM TO BE SOLVED: To make deflection of a carriage 11X of an X linear motor less likely to be generated, while increase in the longitudinal dimension and weight is prevented in an X-Y-θstage apparatus. SOLUTION: Support sliding members of the X linear motor are arranged in at least three portion...

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Bibliographische Detailangaben
Hauptverfasser:	HASHIMOTO HIROSHI, TOYOSAKI NORIO, KATO HISASHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILSOF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DYNAMO-ELECTRIC MACHINES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY GENERATION HOLOGRAPHY INSTRUMENT DETAILS MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To make deflection of a carriage 11X of an X linear motor less likely to be generated, while increase in the longitudinal dimension and weight is prevented in an X-Y-θstage apparatus. SOLUTION: Support sliding members of the X linear motor are arranged in at least three portions in the stage apparatus, and positioned at nearly equal intervals.