METHOD AND DEVICE FOR DETECTING POLISHING END POINT

PROBLEM TO BE SOLVED: To detect a polishing end point at intervals of a time which is smaller than a measurement interval. SOLUTION: With times t1, t2, t3, and so on, while a machine platen is rotating taken as measuring times, spectral characteristics of reflected light, when light is irradiated on...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: FURUSAWA TAKUICHI
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To detect a polishing end point at intervals of a time which is smaller than a measurement interval. SOLUTION: With times t1, t2, t3, and so on, while a machine platen is rotating taken as measuring times, spectral characteristics of reflected light, when light is irradiated on the surface of a wafer in a polishing center and reflected thereon, is extracted and made associated with data of most similar one of models. A straight line M, approximated as the correspondence relation between the spectral characteristic and model data is set, and a time tE, corresponding to model data M12 of a polishing end point on the straight line M, is extracted to predict the remaining time, until the polishing end point.