METHOD FOR PRODUCING QUARTS GLASS HAVING CORROSION RESISTANCE AND MEMBER AND APPARATUS USING THE QUARTS GLASS

PROBLEM TO BE SOLVED: To provide quarts glass having both plasma corrosion resistance and good dispersibility of added elements while solving problems of conventional technology, a method for easily producing it, a quarts glass member utilizable for a semiconductor container, jig tools, a bell jar of a plasma etcher or the like, and apparatuses for producing semiconductor and liquid crystal provided with the member. SOLUTION: This method for producing anticorrosive quarts glass comprises the steps of mixing a solution of compounds containing aluminum and/or yttrium with silica powder, and after stirring, holding the mixed solution at 60 to 130 deg.C to gradually evaporate the solvent, raising temperature to 300 to 500 deg.C under oxidative atmosphere to convert the compounds containing aluminum and/or yttrium into oxides, then cooling it to obtain calcined powder, and electrically fusing the obtained powder at a temperature of 1700 deg.C or above under reduced pressure to obtain the quarts glass. The member and the apparatus use the quarts glass.