CORROSION SENSOR

PROBLEM TO BE SOLVED: To provide a corrosion sensor which evaluates a corrosive property in an environment to be measured and accurately measures a corroded quantity of a metal thin film exposed to the environment to be measured. SOLUTION: The corrosion sensor measures types of corrosive materials e...

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Bibliographische Detailangaben
Hauptverfasser:	MINAMITANI RINTARO, AONO TERUYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a corrosion sensor which evaluates a corrosive property in an environment to be measured and accurately measures a corroded quantity of a metal thin film exposed to the environment to be measured. SOLUTION: The corrosion sensor measures types of corrosive materials existing in the environment and the corroded quantity of an object material by the corrosive material. In the corrosion sensor, the type of the corrosive material is estimated and the corroded quantity of the object material is found based on a ratio of X-ray intensity of an element of the corrosive material to an element of an object thin film material by using an X-ray micro analyzer after the object thin film material is formed on a substrate comprising an element different from the object material and the formation is placed in the environment to be examined.