METHOD FOR RECYCLING PERFLUOROCOMPOUND

PROBLEM TO BE SOLVED: To provide a method for recycling PFC, by which fluorine sources in a PFC mixture are effectively used without waste and are recycled for a semiconductor manufacturing process, without the problem of atmospheric discharge of a compound nor the problem of the disposal of chemica...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	NAGANO SHUJI, EDASAWA KATSUTO, OYA KOZO, MANABE TAKESHI, NITTA AKIHIKO, ANDO HIDEKI, HACHITAKA KENICHI, GOTO MASATOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSEGASES [GHG] CHEMISTRY CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS COMBINED HEATING AND REFRIGERATION SYSTEMS COMPOUNDS THEREOF ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HEAT PUMP SYSTEMS HEATING INORGANIC CHEMISTRY LIGHTING LIQUEFACTION SOLIDIFICATION OF GASES LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS MANUFACTURE OR STORAGE OF ICE MECHANICAL ENGINEERING METALLURGY MIXTURES BY PRESSURE AND COLD TREATMENT NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL REFRIGERATION OR COOLING SEMICONDUCTOR DEVICES SEPARATION TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE TRANSPORTING WEAPONS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for recycling PFC, by which fluorine sources in a PFC mixture are effectively used without waste and are recycled for a semiconductor manufacturing process, without the problem of atmospheric discharge of a compound nor the problem of the disposal of chemicals used for reaction entailing global warming, and an increase in the brittleness of a reactor material and the by-product of a high-boiling-point body like CS2 are suppressed, and is implemented safely for a long period. SOLUTION: The PFC mixture collected from semiconductor manufacturing process waste gas is brought into contact with activated carbon under a temperature condition of >=500 deg.C in the state of being mixed with inert gas and then brought into contact with an alkali earth metal compound under a temperature condition of >=100 deg.C; and methane tetrafluoride and ethane hexafluoride are separated and collected from the reaction mixture through rectification and supplied for reuse as PFC for the semiconductor manufacturing process.