DRESSING DEVICE AND DRESSING METHOD FOR POLISHING CLOTH

PROBLEM TO BE SOLVED: To provide a simple dressing device and dressing method for a polishing cloth having ability of discharging foreign matters or dirt of a surface of a pad in addition to ability of raising and arranging bristle of the surface of the pad. SOLUTION: This dressing device for the po...

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Bibliographische Detailangaben
Hauptverfasser:	SUNAJI NAOYA, OMORI HIDEMI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a simple dressing device and dressing method for a polishing cloth having ability of discharging foreign matters or dirt of a surface of a pad in addition to ability of raising and arranging bristle of the surface of the pad. SOLUTION: This dressing device for the polishing cloth 18 dresses the polishing cloth 18 by pressing a dressing brush 20 onto the polishing cloth 18 stuck on a rotary surface plate 12, and rotating the rotary surface plate 12 and the dressing brush 20. The dressing brush 20 has shape and size wherein the dressing brush 20 projects from the periphery of the rotary surface plate 12 when the dressing brush 20 dresses the polishing cloth 18.