METHOD OF MANUFACTURING MICROMECHANIC STRUCTURAL MEMBER

PROBLEM TO BE SOLVED: To provide a manufacturing method of a micromechanic structural member having no defect of a conventional technology. SOLUTION: This manufacturing method comprises processes of preparing base boards 1, 2 and 4 having a front face and a back face, structurizing the front face of...

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Hauptverfasser:	FREY WILHELM DR, FISCHER FRANK, METZGER LARS, BISCHOF UDO
Format:	Patent
Sprache:	eng
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a manufacturing method of a micromechanic structural member having no defect of a conventional technology. SOLUTION: This manufacturing method comprises processes of preparing base boards 1, 2 and 4 having a front face and a back face, structurizing the front face of the base boards 1, 2 and 4, at least partially covering the structurized front face of the base boards 1, 2 and 4 with germanium containing protective layers 7, 7' and 7", structurizing the back face of the base boards 1, 2 and 4, and at least partially removing the germanium containing protective layers 7, 7' and 7" from the structurized front face of the base boards 1, 2 and 4.