DEVICE AND METHOD FOR MANUFACTURING CRYSTALLINE SHEET

PROBLEM TO BE SOLVED: To provide a device and a method for manufacturing a crystalline sheet in which the reliability and productivity to the manufacture of the crystalline sheet such as a silicon sheet are improved, the heat loss is minimized as much as possible, and the manufacturing cost is reduc...

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Bibliographische Detailangaben
Hauptverfasser: YANO KOZABURO, YAMASHITA ZENJIRO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a device and a method for manufacturing a crystalline sheet in which the reliability and productivity to the manufacture of the crystalline sheet such as a silicon sheet are improved, the heat loss is minimized as much as possible, and the manufacturing cost is reduced. SOLUTION: A holder 5 with immersion members disposed on an outer circumferential surface is disposed in a rotational and slidable manner in at least one recess of an outer circumferential surface of a rotating body 3, at least one heat insulation chamber 29 constituted of the outer circumferential surface of the rotating body 3 and a partition member 4 is provided, only the immersion step in the holder 5 is performed in one heat insulation chamber 29c, and the holder 5 is fed or taken out in another heat insulation chamber. The immersion step, the feeding step, the taking-out step, etc., are performed by the rotation of the rotating body 3 independently and parallel to each other.