DEVICE FOR PREVENTING ERRONEOUS REMOVAL OF SUBSTRATE

PROBLEM TO BE SOLVED: To obtain a device for preventing erroneous removal for an apparatus being removably loaded with a large number of substrates in which the state of the apparatus is judged totally, and a substrate not to be drawn out can be locked so that it is not drawn out erroneously by a ma...

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1. Verfasser: IDA TOMONAGA
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To obtain a device for preventing erroneous removal for an apparatus being removably loaded with a large number of substrates in which the state of the apparatus is judged totally, and a substrate not to be drawn out can be locked so that it is not drawn out erroneously by a maintenance person, but when it can not be locked, it is detected, and the device can be realized at a cost proportional to the number of substrates. SOLUTION: A device having a body and substrates being loaded to the body through a connector is provided with means for making a decision whether any substrate can be drawn out or not, and a lock means for preventing the loaded substrate from being drawn out erroneously when a decision is made that draw-out of substrate is prohibited.