SUBSTRATE SELECTING DEVICE AND SUPPLY METHOD FOR SUBSTRATE FOR DRAWING
PROBLEM TO BE SOLVED: To provide a substrate selecting device which is used for pattern drawing for photomask production, can supply a substrate meeting quality specifications of a target product, does not waste a photosensitive material, and is satisfactory in terms of cost and productivity. SOLUTI...
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| creator | NARA HIDEYUKI |
| description | PROBLEM TO BE SOLVED: To provide a substrate selecting device which is used for pattern drawing for photomask production, can supply a substrate meeting quality specifications of a target product, does not waste a photosensitive material, and is satisfactory in terms of cost and productivity. SOLUTION: This device has a light shading film defect information database which stores light shading film defect information on each light shading film- formed substrate, a light shading film defect registration part which registers light shading film defect information in the light shading film defect information database, a drawing information database which stores drawing information on a pattern to be drawn, a drawing information registration part which registers the drawing information on the pattern to be drawn in the drawing information database, and a light shading film-formed substrate selection part which selects a shading film-formed substrate applicable to the target product by one or more means from the drawing information and light shading film information stored in each database; and the light shading film-formed substrate selection part selects the light shading film-formed substrate applied to the target product. |
| format | Patent |
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SOLUTION: This device has a light shading film defect information database which stores light shading film defect information on each light shading film- formed substrate, a light shading film defect registration part which registers light shading film defect information in the light shading film defect information database, a drawing information database which stores drawing information on a pattern to be drawn, a drawing information registration part which registers the drawing information on the pattern to be drawn in the drawing information database, and a light shading film-formed substrate selection part which selects a shading film-formed substrate applicable to the target product by one or more means from the drawing information and light shading film information stored in each database; and the light shading film-formed substrate selection part selects the light shading film-formed substrate applied to the target product.</description><edition>7</edition><language>eng</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; BASIC ELECTRIC ELEMENTS ; CINEMATOGRAPHY ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; ELECTROGRAPHY ; HOLOGRAPHY ; MATERIALS THEREFOR ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS ; SEMICONDUCTOR DEVICES</subject><creationdate>2002</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20020927&DB=EPODOC&CC=JP&NR=2002278046A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20020927&DB=EPODOC&CC=JP&NR=2002278046A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>NARA HIDEYUKI</creatorcontrib><title>SUBSTRATE SELECTING DEVICE AND SUPPLY METHOD FOR SUBSTRATE FOR DRAWING</title><description>PROBLEM TO BE SOLVED: To provide a substrate selecting device which is used for pattern drawing for photomask production, can supply a substrate meeting quality specifications of a target product, does not waste a photosensitive material, and is satisfactory in terms of cost and productivity. SOLUTION: This device has a light shading film defect information database which stores light shading film defect information on each light shading film- formed substrate, a light shading film defect registration part which registers light shading film defect information in the light shading film defect information database, a drawing information database which stores drawing information on a pattern to be drawn, a drawing information registration part which registers the drawing information on the pattern to be drawn in the drawing information database, and a light shading film-formed substrate selection part which selects a shading film-formed substrate applicable to the target product by one or more means from the drawing information and light shading film information stored in each database; and the light shading film-formed substrate selection part selects the light shading film-formed substrate applied to the target product.</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CINEMATOGRAPHY</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>MATERIALS THEREFOR</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2002</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHALDnUKDglyDHFVCHb1cXUO8fRzV3BxDfN0dlVw9HNRCA4NCPCJVPB1DfHwd1Fw8w9SQGgA8VyCHMOBWngYWNMSc4pTeaE0N4OSm2uIs4duakF-fGpxQWJyal5qSbxXgJGBgZGRuYWBiZmjMVGKABtpLOI</recordid><startdate>20020927</startdate><enddate>20020927</enddate><creator>NARA HIDEYUKI</creator><scope>EVB</scope></search><sort><creationdate>20020927</creationdate><title>SUBSTRATE SELECTING DEVICE AND SUPPLY METHOD FOR SUBSTRATE FOR DRAWING</title><author>NARA HIDEYUKI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2002278046A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2002</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CINEMATOGRAPHY</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>ELECTROGRAPHY</topic><topic>HOLOGRAPHY</topic><topic>MATERIALS THEREFOR</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>NARA HIDEYUKI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>NARA HIDEYUKI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>SUBSTRATE SELECTING DEVICE AND SUPPLY METHOD FOR SUBSTRATE FOR DRAWING</title><date>2002-09-27</date><risdate>2002</risdate><abstract>PROBLEM TO BE SOLVED: To provide a substrate selecting device which is used for pattern drawing for photomask production, can supply a substrate meeting quality specifications of a target product, does not waste a photosensitive material, and is satisfactory in terms of cost and productivity. SOLUTION: This device has a light shading film defect information database which stores light shading film defect information on each light shading film- formed substrate, a light shading film defect registration part which registers light shading film defect information in the light shading film defect information database, a drawing information database which stores drawing information on a pattern to be drawn, a drawing information registration part which registers the drawing information on the pattern to be drawn in the drawing information database, and a light shading film-formed substrate selection part which selects a shading film-formed substrate applicable to the target product by one or more means from the drawing information and light shading film information stored in each database; and the light shading film-formed substrate selection part selects the light shading film-formed substrate applied to the target product.</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES |
| title | SUBSTRATE SELECTING DEVICE AND SUPPLY METHOD FOR SUBSTRATE FOR DRAWING |
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