INSPECTING DEVICE
PROBLEM TO BE SOLVED: To obtain an excellent image by assembling a plurality of relay lens optical systems and aligning the optical axes of 1st and 2nd extended relay lens barrels in a horizontal direction. SOLUTION: This inspecting device is provided with a guide mechanism 50 capable of turning a r...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To obtain an excellent image by assembling a plurality of relay lens optical systems and aligning the optical axes of 1st and 2nd extended relay lens barrels in a horizontal direction. SOLUTION: This inspecting device is provided with a guide mechanism 50 capable of turning a relay coupling lens barrel part 6, holding the relay coupling lens barrel part 6 of the 1st and the 2nd extended relay lens barrels movably in an up-and-down direction, and moving interlocked with the movement of the 1st and the 2nd extended relay lens barrels at the time of moving a microscopic head part 20 so as to guide the locus of the relay coupling lens barrel part 6. |
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