PNEUMATIC CYLINDER FOR VACUUM CHAMBER AND X-RAY ANALIZER USING THE SAME

PROBLEM TO BE SOLVED: To prevent a piston rod from being rotated around a shaft and to sufficiently prevent the air leakage into a vacuum chamber in an pneumatic cylinder directly mounted on an outer wall of the vacuum chamber. SOLUTION: An annular rod packing 5 in which a cylindrical part of a pist...

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1. Verfasser: SUMII HIROSHI
Format: Patent
Sprache:eng
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