PNEUMATIC CYLINDER FOR VACUUM CHAMBER AND X-RAY ANALIZER USING THE SAME
PROBLEM TO BE SOLVED: To prevent a piston rod from being rotated around a shaft and to sufficiently prevent the air leakage into a vacuum chamber in an pneumatic cylinder directly mounted on an outer wall of the vacuum chamber. SOLUTION: An annular rod packing 5 in which a cylindrical part of a pist...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To prevent a piston rod from being rotated around a shaft and to sufficiently prevent the air leakage into a vacuum chamber in an pneumatic cylinder directly mounted on an outer wall of the vacuum chamber. SOLUTION: An annular rod packing 5 in which a cylindrical part of a piston rod 4 is penetrated in a state of being closely abutted thereto, is mounted on a front part 2b of the cylinder 2, and the piston rod 4 is inserted therein to make a drive pin hole 2f for inhibiting the rotation of the piston rod 4 around the shaft, on a rear part 2c of the cylinder 2. |
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