DEVICE FOR REMOVING DEPOSIT

DEVICE FOR REMOVING DEPOSIT

PROBLEM TO BE SOLVED: To facilitate the removal of deposit stuck to sampling hole for measurement in the reaction chamber of a semiconductor producing apparatus. SOLUTION: A brush unit 160 connected to a traveling unit 120 controlled by a controller 110, is traveled with the movement of the travelin...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: INOUE IKURO
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CLEANING
CLEANING IN GENERAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
SEMICONDUCTOR DEVICES
TRANSPORTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To facilitate the removal of deposit stuck to sampling hole for measurement in the reaction chamber of a semiconductor producing apparatus. SOLUTION: A brush unit 160 connected to a traveling unit 120 controlled by a controller 110, is traveled with the movement of the traveling unit 120. The traveling unit 120 mounted with a motor or the like is made to rotate a brush unit 160 through a rotary shaft in a horizontal direction 130, a gear box 140 and a rotary shaft in a vertical direction 150. The brush unit 160 is so traveled as to pinch the depth of the sampling hole 20 and is rotated to remove the deposit.