METHOD FOR COOLING LARGE SIZED GLASS SUBSTRATE AND DEVICE FOR THE SAME

PROBLEM TO BE SOLVED: To provide a method and a device for cooling a large sized glass substrate, which doesn't need excessive cost, capable of reducing generation of breaking of the substrate while cooling after heat process. SOLUTION: The cooling device 100 for the large sized glass substrate...

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Hauptverfasser: AWAKAWA HIDEO, MITSUI YASUHIRO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method and a device for cooling a large sized glass substrate, which doesn't need excessive cost, capable of reducing generation of breaking of the substrate while cooling after heat process. SOLUTION: The cooling device 100 for the large sized glass substrate is composed of a plurality of units each consisting of a divergent spray nozzle 15 capable of changing corresponding to the size of the substrate by performing a central cooling method which blows diverged air at the center part of the substrate 10 while diverging the air uniformly to wide range, supporting pin 12 for supporting the substrate 10, an air piping 13 which supplies air to the nozzle 15, and a metal plate 11 which holds above members, and a mechanism for regulating a rate of air flow and controlling direction of air flow.