DRIVER AND METHOD OF OPERATING MICRO-ELECTROMECHANICAL SYSTEM(MEMS) DEVICE

PROBLEM TO BE SOLVED: To provide a driver and a method of operating a micro- electromechanical system(MEMS) device. SOLUTION: The driver for use with a micro-electromechanical system(MEMS) device, the method for operating the same, and a MEMS device employing the driver and the method are disclosed....

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Bibliographische Detailangaben
Hauptverfasser:	CHANG EDWARD, GASPARYAN ARMAN
Format:	Patent
Sprache:	eng
Schlagworte:	CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERATION MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a driver and a method of operating a micro- electromechanical system(MEMS) device. SOLUTION: The driver for use with a micro-electromechanical system(MEMS) device, the method for operating the same, and a MEMS device employing the driver and the method are disclosed. In one embodiment, the driver is provided with an actuation subsystem which supplies an actuation voltage for altering an angle of an optical element of the MEMS device. The driver is further provided with a bias subsystem which is coupled to the actuation subsystem, applies a bias voltage between the optical element and the actuation subsystem, thereby reduces the actuation voltage.