FINELY ASSEMBLING EQUIPMENT FOR MICRO-MANIPULATOR

PROBLEM TO BE SOLVED: To enable additional processings in FIB system, while observing with high magnification and high resolution by separating a thin piece processed on an wafer with FIB equipment from the wafer, and in order to observe with TEM equipment, it is integrated to a grid with adhesion. SOLUTION: A work stand 4, which serves as a duty of handling and adhesion is installed in a stage 5 of a microscope 1. A glass board 16, which can move horizontally, is inserted to an upper surface of the work stand 4, and a grid 13 and the thin piece 12 are laid on this glass plate 16. It is made to approach gradually, so that a thin piece 12 may be brought close to a grid 13 side, by making the glass board 16 coarse movement and slight movement, and after contacting, they are bonded and unified.