DRESSING DEVICE AND POLISHING DEVICE HAVING IT

PROBLEM TO BE SOLVED: To provide a dressing device capable of lightening a dressing load in dressing a polishing surface on a polishing table and a polishing device having the dressing device. SOLUTION: This dressing device 20 dresses the polishing surface 1a of the polishing table 5 for slidably co...

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Bibliographische Detailangaben
Hauptverfasser:	TAKADA NOBUYUKI, NOMICHI IKUTARO, TOGAWA TETSUJI, KOJIMA SHIYUNICHIROU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a dressing device capable of lightening a dressing load in dressing a polishing surface on a polishing table and a polishing device having the dressing device. SOLUTION: This dressing device 20 dresses the polishing surface 1a of the polishing table 5 for slidably contacting with a polished object to polish the polished object by slidably contacting a dressing member 22 with the polishing surface. The dressing device 20 comprises a dresser body 31 connected to a vertically movable dresser driving shaft 23 and a dresser plate 32 that is disposed vertically movably with respect to the dresser body 31 and holds the dressing member 22.