METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor device by which a manufacturing cost can be made low and an apparatus-operating ratio can be raised. SOLUTION: This method for manufacturing the semiconductor device comprises a film forming step for forming a film including...
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Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a method for manufacturing a semiconductor device by which a manufacturing cost can be made low and an apparatus-operating ratio can be raised. SOLUTION: This method for manufacturing the semiconductor device comprises a film forming step for forming a film including Ru on the substrate 1 in a reaction chamber 4, a cleaning step for flowing ClF3 gas into the reaction chamber 4 and removing the film adhered to the inside of the reaction chamber 4 in the film forming step, and a purging step for purging the reaction chamber 4 at a lower pressure than that in cleaning, for example, 133 Pa or less, after the cleaning step. |
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