SIX-AXIS POSITIONING SYSTEM HAVING NON-MAGNETIC FIELD SPACE

PROBLEM TO BE SOLVED: To further expand a positioning thread so as to attain the high precision under a high vacuum as preposition conditions for accurate exposure and measuring of a fine structure. SOLUTION: A substrate positioning device contains a holding system 4 for receiving a substrate by sli...

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Bibliographische Detailangaben
Hauptverfasser:	SCHOFFEL CHRISTOPH, HOFFMANN ANDREW, ZENTNER JOHANNES, BECKERT ERIK, SAFFERT EUGEN, GRAMSCH TORSTEN, KIRSCHSTEIN ULF-CARSTEN
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To further expand a positioning thread so as to attain the high precision under a high vacuum as preposition conditions for accurate exposure and measuring of a fine structure. SOLUTION: A substrate positioning device contains a holding system 4 for receiving a substrate by sliding on a straight line guide for receiving a substrate; drive devices 1, 2 for changing to some degree an inclination in a guide direction in Y coordinates by orientating the guide direction of a straight line guide 3 in parallel to or intrinsically in parallel to the Y coordinate of an X, Y and Z space coordinates system; the drive devices 1, 2 for rotating the straight line guide 3 around the guide direction containing the holding system 4; and the drive devices 1, 2 for parallel-sliding the straight line guide 3 containing the holding system 4 in a direction of the X coordinate, in a direction of the Y coordinate and/or in a direction of the Z coordinate.