AUTOMATED HIGH SPEED OPTICAL INSPECTOR

PROBLEM TO BE SOLVED: To provide an apparatus for inspecting surface characteristics of a substrate, using TDI sensor means. SOLUTION: The apparatus for inspecting surface characteristics of a substrate comprises a means for approximately uniformly illuminating a first and second patterns in a regio...

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Bibliographische Detailangaben
Hauptverfasser:	FEIN MICHAEL E, WIHL MARK J, JANN P C, TSAI BIN-MING BENJAMIN, BELL WILLIAM, TUCKER III FRANCIS D, NOVAK WALTER THOMAS, CHADWICK CURT H, SHOLES ROBERT R, GREENE JOHN D, HARVEY DAVID J
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING ELECTRIC VARIABLES MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an apparatus for inspecting surface characteristics of a substrate, using TDI sensor means. SOLUTION: The apparatus for inspecting surface characteristics of a substrate comprises a means for approximately uniformly illuminating a first and second patterns in a region for inspecting at least one substrate surface at the same time, a pair of TDI sensor means for taking images of the first and second patterns one after the other, a means 319 for comparing the image-taken first and second patterns, based on the pair of TDI sensor means, and a means 320 for storing the positions of the first and second patterns and the comparison result.