ALIGNER AND METHOD FOR FABRICATING DEVICE

PROBLEM TO BE SOLVED: To suppress occurrence of troubles, e.g. lowering of illuminance due to clouding of an optical member, and increase in the temperature variation width of gas effectively. SOLUTION: Chemical filters CF1a and CF1b for removing chemical contaminants from gas and suppressing the te...

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Bibliographische Detailangaben
Hauptverfasser:	HASHIMOTO MICHINORI, UDAGAWA KENJI, KARIBE FUMIO, YOSHIDA TOMOYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To suppress occurrence of troubles, e.g. lowering of illuminance due to clouding of an optical member, and increase in the temperature variation width of gas effectively. SOLUTION: Chemical filters CF1a and CF1b for removing chemical contaminants from gas and suppressing the temperature variation of gas within a specified range before and after passing through the filters are disposed at a part of a ventilation passage extending from a machine room 14 for containing at least a part of an air conditioner to a body chamber 12 for containing an aligner body 22. Consequently, peripheral atmosphere of the aligner body 22 disposed on the downstream side of the chemical filters CF1a and CF1b is sustained in a state of high chemical cleanliness and temperature variation of the gas, set at a target temperature by the air conditioner, is suppressed after the gas has passed through the chemical filters CF1a and CF1b. More specifically, occurrence of troubles, e.g. lowering of illuminance due to clouding of an optical member, and increase in the temperature variation width of the gas supplied into the body chamber 12 can be suppressed effectively.