GAS LASER DEVICE

PROBLEM TO BE SOLVED: To provide a gas laser device which can reduce an inductance in a path for electric connection between a laser chamber housing a main discharging electrode and a supply means for supplying a compressed current pulse to the main discharging electrode, even during outputting of a...

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Bibliographische Detailangaben
Hauptverfasser: SAJIKI KAZUAKI, HOSHINO HIDEYUKI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a gas laser device which can reduce an inductance in a path for electric connection between a laser chamber housing a main discharging electrode and a supply means for supplying a compressed current pulse to the main discharging electrode, even during outputting of a large laser. SOLUTION: A high-voltage connection 110 is a part which becomes in a high electric potential, and it is arranged along the lengthwise direction of a main discharging electrode 34. A length 110A of the connection 110 in the lengthwise direction is made larger than a width 110B thereof. An insulator 130 is a member which is arranged in a manner to cover the connection 110, and a length 130A of the insulator 130 is made larger than a width 130B thereof. A conductor 120 on GND side is arranged a specified distance apart from the insulator 130 in a manner to surround the insulator 130.