GAS DISCHARGE LASER PROVIDED WITH BLADE INSULATION ELECTRODE

PROBLEM TO BE SOLVED: To provide a gas discharge laser provided with a blade insulation electrode for a gas discharge with an erodable electrode capable of withstanding several billions of pulses without adversely affecting a gas flow and without adversely affecting laser beam quality. SOLUTION: Thi...

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Bibliographische Detailangaben
Hauptverfasser:	WINNICK ROSS H, UJAZDOWSKI RICHARD C, CATES MICHAEL C, HUEBER JEAN-MARC, MORTON RICHARD G
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY DEVICES USING STIMULATED EMISSION ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a gas discharge laser provided with a blade insulation electrode for a gas discharge with an erodable electrode capable of withstanding several billions of pulses without adversely affecting a gas flow and without adversely affecting laser beam quality. SOLUTION: This gas discharge laser is provided with a laser chamber with two elongated erodable electrode elements. At least, one of the electrode elements is provided with a generally blunt blade shape comprised of a material having high electrical conductivity with a flow shaping dielectric fairing positioned on each of two sides of the blunt blade-shaped part. A pulse power system provides electrical pulses at the frequency of at least 1 kHz. A blower circulates laser gas between the electrodes at speeds of at least 10 m/s, and a heat exchanger is provided to remove heat produced by the blower and the discharges.