SEMICONDUCTOR EVALUATION EQUIPMENT

SEMICONDUCTOR EVALUATION EQUIPMENT

PROBLEM TO BE SOLVED: To provide semiconductor evaluation equipment which can easily measure the lifetime at arbitrary or plural measuring frequencies over the wide frequency range, and that does not increase the measuring number in spite of the increase of measuring frequency, with a simple configu...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KATSUMI HIDEO, TAKAMATSU HIROYUKI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide semiconductor evaluation equipment which can easily measure the lifetime at arbitrary or plural measuring frequencies over the wide frequency range, and that does not increase the measuring number in spite of the increase of measuring frequency, with a simple configuration. SOLUTION: By applying a pulsed electromagnetic wave of a pulse width of, e.g. 1 ps, with a frequency spectrum up to several THz on a semiconductor test piece and measuring a reflection wave of the pulsed electromagnetic wave from the test piece repeatedly, frequency dependency of the lifetime can be measured easily to obtain resolution of the semiconductor test piece in the depth direction.