DEVICE FOR GENERATING CARO'S ACID, DEVICE AND METHOD FOR REMOVING RESIST

PROBLEM TO BE SOLVED: To provide a device for generating Caro's acid with which Caro's acid can be obtained without replenishing hydrogen peroxide and to provide a device and a method for removing resist which prevent a resist removing solution from being diluted with the lapse of time to...

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Bibliographische Detailangaben
1. Verfasser:	KAWASHIMA MASAHITO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY CINEMATOGRAPHY COMPOUNDS THEREOF ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY INORGANIC CHEMISTRY MATERIALS THEREFOR METALLURGY NON-METALLIC ELEMENTS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a device for generating Caro's acid with which Caro's acid can be obtained without replenishing hydrogen peroxide and to provide a device and a method for removing resist which prevent a resist removing solution from being diluted with the lapse of time to maintain resist removing ability. SOLUTION: The device for generating Caro's acid 8 has plasma generating means 9 to 12 for generating oxygen plasma and a plasma irradiation chamber 13 in which a solution containing sulfuric acid is irradiated with oxygen plasma. The resist removing device has a resist removing tank 2 for storing the solution and a solution conveying means 15 for circulating the solution between the resist removing tank 2 and the plasma irradiation chamber 13. Further, the resist removing method using the resist removing device is provided.