POLISHING APPARATUS AND METHOD AND METHOD OF MANUFACTURING GLASS SUBSTRATE FOR MAGNETIC STORAGE MEDIUM AND MAGNETIC STORAGE MEDIUM
PROBLEM TO BE SOLVED: To provide a polishing apparatus and method or the like capable of effectively supplying a polishing solution between a laminated glass substrate and a polishing brush or a polishing pad. SOLUTION: The polishing method includes rotating the laminated glass substrate 10 comprisi...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a polishing apparatus and method or the like capable of effectively supplying a polishing solution between a laminated glass substrate and a polishing brush or a polishing pad. SOLUTION: The polishing method includes rotating the laminated glass substrate 10 comprising a plurality of overlying disc-shaped glass substrates 10 each having a circular hole in its center; rotating the polishing brush 4 or polishing pad into contact with the outer peripheral end face portion of the laminated glass substrate 10; and supplying the polishing solution to the outer peripheral end face portion of the laminated glass substrate 10 to polish it. This polishing operation is carried out while the polishing solution is always present in a sufficient amount between the outer peripheral end face portions of all of the plurality of the overlying glass substrates 1 and the polishing brush 4 or polishing pad. |
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