PARALLEL TYPE SEPARATION ANALYTICAL DEVICE AND ANALYTICAL METHOD

PROBLEM TO BE SOLVED: To provide a separation analytical device for analyzing a micro impurity element in material efficiently in a short time, a continuous flow analytical method, high purity tantalum or a high purity tantalum compound, and a highly dielectric membrane formed by using it. SOLUTION:...

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1. Verfasser: KOZONO SHUJI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a separation analytical device for analyzing a micro impurity element in material efficiently in a short time, a continuous flow analytical method, high purity tantalum or a high purity tantalum compound, and a highly dielectric membrane formed by using it. SOLUTION: In this analytical method, plural separation devices are connected in parallel, and analysis is executed by using one or more of the plural separation devices connected in parallel, and one or more of the other separation devices are washed, to thereby execute analysis and washing simultaneously.