METHOD FOR MANUFACTURING TITANIUM OXIDE SINGLE CRYSTAL THIN FILM OF ANATASE-TYPE CRYSTAL STRUCTURE

PROBLEM TO BE SOLVED: To reduce the crystal defect, etc. in a thin film of titanium dioxide by forming the structure of the thin film into single crystal and to improve characteristics such as photocatalytic reaction efficiency, that is, to improve the efficiency of reaction where the decomposition...

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Bibliographische Detailangaben
1. Verfasser:	YAMAMOTO HARUYA
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F CRYSTAL GROWTH DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEPARATION SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THEIR RELEVANT APPARATUS TRANSPORTING UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To reduce the crystal defect, etc. in a thin film of titanium dioxide by forming the structure of the thin film into single crystal and to improve characteristics such as photocatalytic reaction efficiency, that is, to improve the efficiency of reaction where the decomposition and removal of harmful gas such as nitrogen oxides are performed by using the single crystal thin film as a photocatalyst, in a method for manufacturing a titanium dioxide single crystal thin film of anatase-type crystal structure. SOLUTION: There is provided a method for manufacturing the titanium dioxide (TiO2) single crystal thin film having anatase-type crystal structure on a single crystal substrate of lanthanum aluminate (LaAlO3), magnesium oxide (MgO), stabilized zirconia (YSZ) or LSAT([LaAlO3]0.3)-([SrAl0.5Ta0.5O3]0.7) by a laser ablation film deposition method. Moreover, substrate temperature for depositing the titanium dioxide single crystal thin film of anatase-type crystal structure is controlled to 360-520 deg.C, and also oxygen gas pressure is controlled to 10-100 mTorr.