SYSTEM FOR ACQUIRING AND MANAGING WAFER MANUFACTURING DATA

PROBLEM TO BE SOLVED: To provide a semiconductor processing apparatus, provided with at least one sensor and a tool, having a first data communication port and a second data communication port. SOLUTION: A sensor data acquiring subsystem (808) acquires sensor data from the tool via a second port (80...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NISHIMURA YUKARI, LYON RICHARD C, CORDOVA SHERRY, NOLET CLARICE M, KROUPNOVA NATALIA, REISS TERRY, MICHAEL E WILLMER, LOBOVSKI EVGUENI, TOH WOON YOUNG, DOYLE TERRY, LOUNEVA INNA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES
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