SYSTEM FOR ACQUIRING AND MANAGING WAFER MANUFACTURING DATA

PROBLEM TO BE SOLVED: To provide a semiconductor processing apparatus, provided with at least one sensor and a tool, having a first data communication port and a second data communication port. SOLUTION: A sensor data acquiring subsystem (808) acquires sensor data from the tool via a second port (80...

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Bibliographische Detailangaben
Hauptverfasser:	NISHIMURA YUKARI, LYON RICHARD C, CORDOVA SHERRY, NOLET CLARICE M, KROUPNOVA NATALIA, REISS TERRY, MICHAEL E WILLMER, LOBOVSKI EVGUENI, TOH WOON YOUNG, DOYLE TERRY, LOUNEVA INNA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a semiconductor processing apparatus, provided with at least one sensor and a tool, having a first data communication port and a second data communication port. SOLUTION: A sensor data acquiring subsystem (808) acquires sensor data from the tool via a second port (806). The data-acquiring subsystem (808) acquires an MES operation message via a first port (804). The sensor data are communicated to a sensor processing unit (828) of a sensor data processing subsystem (810). The sensor processing unit (828) processes and analyzes the sensor data. Furthermore, the processing unit (828) can be suited to determine a product or processing relation, such as to operate an alarm, when a process is not operated within a management limit, for example. In another embodiment, a method and a device are provided for processing data from a wafer manufacturing facility (1000) provided with plural tools respectively, having first data communication ports (1012-1018) and second data communication ports (1042-1048).