CHARGED PARTICLE BEAM APPARATUS

PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus having a high image noise removing effect. SOLUTION: For the charged particle beam apparatus which performs observation, recording and analysis of an image from a scanning microscope, a digital space-time filter arithmetic circuit 17...

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Bibliographische Detailangaben
1. Verfasser:	YAMADA MITSUGI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus having a high image noise removing effect. SOLUTION: For the charged particle beam apparatus which performs observation, recording and analysis of an image from a scanning microscope, a digital space-time filter arithmetic circuit 17 for processing detected signals is provided in an image signal system.