GAS DETECTOR USING SOLID ELECTROLYTE SENSOR

PROBLEM TO BE SOLVED: To prevent alkali ions from moving to a heater film 20. SOLUTION: An alkali ion conductive solid electrolyte chip 4 is set to one face of an alumna substrate 2. A reference electrode and a detection electrode are connected via through-holesa 14 to the heater film 20 side, using...

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Bibliographische Detailangaben
Hauptverfasser: KANEYASU KAZUNARI, MANABE TASUKE
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To prevent alkali ions from moving to a heater film 20. SOLUTION: An alkali ion conductive solid electrolyte chip 4 is set to one face of an alumna substrate 2. A reference electrode and a detection electrode are connected via through-holesa 14 to the heater film 20 side, using ruthenium oxide. Leads are connected on the heater film 20 side to four pads 22 and 23. The reference electrode and the detecting electrode are separated from a heater, or the detection electrode of negative polarity is made common to the ground side of the heater to drive the detector.