QUARTZ GLASS PRODUCT USED FOR SEMICONDUCTOR PRODUCING DEVICE

PROBLEM TO BE SOLVED: To provide a quartz glass product which has an excellent temperature following property in heating, cooling, etc., is able to suppress increase in process time of a heat treatment, and is used for a semiconductor producing device. SOLUTION: There are provided a 1st quartz glass...

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Bibliographische Detailangaben
Hauptverfasser:	SOTODANI EIICHI, KIN TOMIO, NAGATA TOMOHIRO, YAMAMURA SHIGERU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GLASS MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES METALLURGY MINERAL OR SLAG WOOL SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a quartz glass product which has an excellent temperature following property in heating, cooling, etc., is able to suppress increase in process time of a heat treatment, and is used for a semiconductor producing device. SOLUTION: There are provided a 1st quartz glass member 2b having a face in which grooves 4 are formed and a 2nd quartz glass member 2a which closes the above grooves by being stuck to the groove-formed face of the 1st quartz glass member, the grooves 4 being transformed into paths 3. So a heating fluid or a cooling fluid for promoting temperature rising/lowering is made to flow through the paths 3.