HYDROGEN PEROXIDE DECOMPOSING METHOD FOR CHEMICAL POLISHING WASTE LIQUID

PROBLEM TO BE SOLVED: To provide a hydrogen peroxide decomposing method excellent in operability and environmental protection for a chemical polishing liquid containing hydrogen peroxide. SOLUTION: Metal vanadium or a vanadium compound is added into the chemical polishing waste liquid containing hyd...

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Bibliographische Detailangaben
Hauptverfasser: TAKAHASHI KENICHI, MORIYAMA KENICHI, KOGURE NAOKI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a hydrogen peroxide decomposing method excellent in operability and environmental protection for a chemical polishing liquid containing hydrogen peroxide. SOLUTION: Metal vanadium or a vanadium compound is added into the chemical polishing waste liquid containing hydrogen peroxide.