SCANNING TYPE CHARGED PARTICLE MICROSCOPE, METHOD OF FOCUSING IT AND METHOD OF COMPENSATING ITS ASTIGMATISM

PROBLEM TO BE SOLVED: To provide a method of enabling simple and reliable focusing like a wobblier device in a transmission electron microscope method. SOLUTION: A crossover 11 is provided between a charged particle gun 1 and an objective lens 6, and a deflector 4 to deflect a charged particle beam...

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Bibliographische Detailangaben
1. Verfasser:	NOMURA SADAO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY GAMMA RAY OR X-RAY MICROSCOPES INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES IRRADIATION DEVICES MEASURING NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method of enabling simple and reliable focusing like a wobblier device in a transmission electron microscope method. SOLUTION: A crossover 11 is provided between a charged particle gun 1 and an objective lens 6, and a deflector 4 to deflect a charged particle beam with the crossover as a fulcrum is provided. An overall controller 9 computes an unfocused quantity from the movement of a microscope image caused by beam deflection, and commands to the power source of the object lens to deflect a focus distance.