SUBSTRATE PROCESSING APPARATUS

PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of decreasing footprint and increasing the number of units. SOLUTION: The substrate processing apparatus comprises a plurality of rotation system units 19, 30, and 31 for processing the substrate by rotating them, a plurality...

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1. Verfasser: TATEYAMA KIYOHISA
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creator TATEYAMA KIYOHISA
description PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of decreasing footprint and increasing the number of units. SOLUTION: The substrate processing apparatus comprises a plurality of rotation system units 19, 30, and 31 for processing the substrate by rotating them, a plurality of thermal system units 20 to 21 and 32 to 34 for heating and cooling the substrate in failures of rotation of them, and transfer paths 16 and 24 for forming the transferring paths of the transfer devices 15 and 25 for transferring the substrate in and out of the unit, wherein the rotation system units 19, 30, and 31 are lined along the transfer paths 16 and 24, the thermal system units 20 to 23 and 32 to 34 are arranged in multiply piled up state and arranged so as to surround a point on the transfer paths 16 and 24 or their extension line.
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SOLUTION: The substrate processing apparatus comprises a plurality of rotation system units 19, 30, and 31 for processing the substrate by rotating them, a plurality of thermal system units 20 to 21 and 32 to 34 for heating and cooling the substrate in failures of rotation of them, and transfer paths 16 and 24 for forming the transferring paths of the transfer devices 15 and 25 for transferring the substrate in and out of the unit, wherein the rotation system units 19, 30, and 31 are lined along the transfer paths 16 and 24, the thermal system units 20 to 23 and 32 to 34 are arranged in multiply piled up state and arranged so as to surround a point on the transfer paths 16 and 24 or their extension line.</description><edition>7</edition><language>eng</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; BASIC ELECTRIC ELEMENTS ; CINEMATOGRAPHY ; CONVEYING ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; ELECTROGRAPHY ; HANDLING THIN OR FILAMENTARY MATERIAL ; HOLOGRAPHY ; MATERIALS THEREFOR ; ORIGINALS THEREFOR ; PACKING ; PERFORMING OPERATIONS ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS ; PNEUMATIC TUBE CONVEYORS ; SEMICONDUCTOR DEVICES ; SHOP CONVEYOR SYSTEMS ; STORING ; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING ; TRANSPORTING</subject><creationdate>2001</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20011221&amp;DB=EPODOC&amp;CC=JP&amp;NR=2001351852A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20011221&amp;DB=EPODOC&amp;CC=JP&amp;NR=2001351852A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>TATEYAMA KIYOHISA</creatorcontrib><title>SUBSTRATE PROCESSING APPARATUS</title><description>PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of decreasing footprint and increasing the number of units. 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subjects APPARATUS SPECIALLY ADAPTED THEREFOR
BASIC ELECTRIC ELEMENTS
CINEMATOGRAPHY
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROGRAPHY
HANDLING THIN OR FILAMENTARY MATERIAL
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PACKING
PERFORMING OPERATIONS
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
title SUBSTRATE PROCESSING APPARATUS
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