METHOD FOR CORRECTING PHYSICALLY CONDITIONED ERROR IN MEASURING MICROSCOPIC OBJECT

METHOD FOR CORRECTING PHYSICALLY CONDITIONED ERROR IN MEASURING MICROSCOPIC OBJECT

PROBLEM TO BE SOLVED: To eliminate effects by surrounding structures in measuring an object which directly affect and damage the object to be measured and measured results because an obtained luminance image is composed of an overlap of the object and the structure arranged near the structure. SOLUT...

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Bibliographische Detailangaben
Hauptverfasser: HARTMANN HANS, WAAS THOMAS, EISENMANN HANS, BRUECK HANS-JUERGEN
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To eliminate effects by surrounding structures in measuring an object which directly affect and damage the object to be measured and measured results because an obtained luminance image is composed of an overlap of the object and the structure arranged near the structure. SOLUTION: (a) An image of the object to be measured is detected. (b) The object visualized in the detected image is measured at 106. (c) Errors of measurement by the surrounding structure arranged near the object to be measured are determined at 112. (d) The measurement in the step (b) is corrected at 108 in accordance with the determined errors of measurement.