QUARTZ PIPE HEATER DEVICE

PROBLEM TO BE SOLVED: To provide a quartz pipe heater device in which the life of the quartz pipe heater can be greatly improved in a very simple structure. SOLUTION: The quartz pipe heater device comprises a quartz pipe heater having the heat source 12 housed inside the quartz pipe 10 and disposed in the cleaning tank 100, and has a heating portion 36 provided on the bottom wall inner face 100a of the cleaning tank and comprises one or plural pieces of reflecting plates 38 between the heat source 12 housed in the quartz pipe of the heating portion 36 and the quartz pipe inner wall 37. The reflecting plate is disposed between the heat source 12 and the quartz pipe inner wall 37 and the heat source 12 is made not to directly contact the bottom side inner wall of the quartz pipe, and the reflecting plate insulates the heat from the heat source 12 and protects the quartz pipe by reflecting the heat. At the same time the reflecting plate disperses the heat toward the fluid L by thermal reflection and improves the heat radiation efficiency as well as preventing heat loss.