ELECTRON BEAM INSPECTION DEVICE

PROBLEM TO BE SOLVED: To prevent contamination of samples in a simple structure without deterioration of resolution in an electron beam inspection device. SOLUTION: The electron beam inspection device irradiates electron beam from an electron gun in an electron gun chamber onto samples placed in a s...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	SATO OSAMU, KITSUNAI HIROYUKI, SHIMIZU MINORU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To prevent contamination of samples in a simple structure without deterioration of resolution in an electron beam inspection device. SOLUTION: The electron beam inspection device irradiates electron beam from an electron gun in an electron gun chamber onto samples placed in a sample room and detects secondary electron and reflected electron generated from the samples. With this kind of the electron beam inspection device, a means for generating active species of hydrogen is provided in the sample room, where hydrocarbon system gas remaining in the sample room is dissolved into carbon dioxide (CO2) and water (H2O) through oxidization by activated species of oxygen, to eliminate hydrocarbon system gas from inside the sample room, thus, contamination of the samples can be cut off.