METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY DEVICE AND SUBSTRATE HOLDING DEVICE USED FOR THAT METHOD

METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY DEVICE AND SUBSTRATE HOLDING DEVICE USED FOR THAT METHOD

PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid crystal display device by which electrification of a substrate constituting the liquid crystal display device can be prevented when the substrate is removed from the substrate holding part of each processing device, the potential o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MATSUEDA HIRONORI, ABE HAJIME, OISHI TAKAYUKI, YOSHIDA KAZUO, HIRAKAWA MAKOTO, TSUKASAKI TAKASHI
Format: Patent
Sprache:eng
Schlagworte:
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING
FREQUENCY-CHANGING
NON-LINEAR OPTICS
OPTICAL ANALOGUE/DIGITAL CONVERTERS
OPTICAL LOGIC ELEMENTS
OPTICS
PHYSICS
TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid crystal display device by which electrification of a substrate constituting the liquid crystal display device can be prevented when the substrate is removed from the substrate holding part of each processing device, the potential of the substrate is always kept low without decreasing the productivity, and thereby, damages of the liquid crystal display device or deposition of foreign matter due to electrostatic charges can be prevented, and to provide a substrate holding device to be used for the method. SOLUTION: A lubricator 6 filled with ethanol is disposed in the midway of an air supply pipe 5 for releasing vacuum in the substrate holding device which holds a substrate 1 by vacuum sucking. When vacuum sucking of the substrate 1 is released, ethanol together with air for releasing is supplied to between the substrate 1 and the substrate holding part (stage 2), and the substrate 1 is removed from the stage 2 in this state.